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Lab Chip, 2007, 7, 164 - 166, DOI: 10.1039/b614419e

A class of low voltage, elastomer–metal wet actuators for use in high-density microfluidics

Tushar Bansal, Meng-Ping Chang and Michel M. Maharbiz

We report a class of wet MEMS elastomer–metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.

Graphical abstract image for this article (ID: b614419e)