Issue 9, 2003
From the journal:

Journal of Analytical Atomic Spectrometry

Erosion rate measurements for GD-OES†

L. Wilken,a   V. Hoffmanna  and  K. Wetziga  

a Leibniz Institute for Solid State and Materials Research Dresden, PO Box 270116, D-01171 Dresden, Germany
E-mail: L.Wilken@ifw-dresden.de

Abstract

For GD-OES the sputtering rate of standard reference materials is needed for calibration purposes. A modern optical profilometer is used to measure 3D crater profiles. The crater volume, the erosion and the sputtering rate is calculated. A series of measurements was performed at reference materials and different plasma conditions. The plot of the reduced sputtering rates versus voltage proves the validity of the Boumans formula.

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Article information

DOI
https://doi.org/10.1039/B306768H
Article type
Paper
Submitted
13 Jun 2003
Accepted
08 Jul 2003
First published
13 Aug 2003

J. Anal. At. Spectrom., 2003,18, 1141-1145

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Erosion rate measurements for GD-OES

L. Wilken, V. Hoffmann and K. Wetzig, J. Anal. At. Spectrom., 2003, 18, 1141 DOI: 10.1039/B306768H

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