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Caption : <b>fig. s1</b> schematic of the glass-based microfluidic chip. (a) illustration of the three-layer configuration of the chip. (b) image of the fabricated chip.

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Caption : <b>fig. s2</b> schematic of the electrical control circuit. (a) diagram of the circuit. (b) timing chart of the circuit.

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Caption : <b>fig. s3</b> physical mechanism of the femtosecond-laser-pulse-induced cavitation bubble generation. when water is irradiated by an intense near-infrared femtosecond laser pulse, water molecules absorb the pulse by multiphoton absorption, are electronically excited, and relax to vibrational excited states within tens of picoseconds. because the duration of this process is significantly shorter than the time scale of the increasing equilibrium intermolecular distance of the vigorous water molecules, the stress caused by the vibrational excited states is confined within the focal volume of the laser pulse. the confined stress propagates from the focal volume to the surrounding medium at sonic speed as shockwaves. the shockwave propagation abruptly decreases the hydrostatic pressure around the laser focus and induces its explosive vaporization without a considerable temperature increase, which corresponds to the formation of a cavitation bubble. this mechanism of the femtosecond-pulse-induced cavitation bubble generation is significantly different from that of the nanosecond-laser-pulse-induced cavitation bubble generation, whereas the only difference in the implementation between them is the pulse width (by six orders of magnitude). in the case of the nanosecond laser pulse excitation, water molecules absorb the pulse by multiphoton and subsequent cyclic absorptions, are electronically excited, and relax to vibrational excited states. the absorption and relaxation of the water molecules simultaneously occur during the pulse duration (~1 ns). this duration allows the vigorous water molecules to change their equilibrium intermolecular distance. the stress caused by the vibrational excited states moves out of the laser focal volume, and its temperature increases. this temperature rise contributes to the generation of a large cavitation bubble with an expansion that induces shock and stress waves.