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Caption : fig. s1. size-controlled of pss profiles under etch time (a) 4 min, (b) 5 min, (c) 6 min and (d) 7min. corresponding sizes of nanoparticle are 503, 353, 421, and 198 nm, respectively.

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Caption : fig. s2. cross-sectional sem image of pss under etch 4 min. the scale bar represents 500 nm.

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Caption : fig. s3. optical property of individual si3n4 nanoparticle at normal illustration (0°).

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Caption : fig. s4. the refractive index (n) of si3n4 material in the ultraviolet to the near-infrared wavelength.