28
HMDS; Picture 1
 N   -0.19670    2.22600    0.30510
 H   -0.77200    2.65720   -0.41820
Si    0.32700    3.32680    1.57310
Si    0.10420    0.50900    0.06970
 C   -0.81880    4.83270    1.52940
 H   -0.53390    5.56950    2.30340
 H   -0.76850    5.34510    0.54990
 H   -1.87030    4.54040    1.70770
 C    2.11560    3.89640    1.30910
 H    2.81100    3.03740    1.32930
 H    2.22910    4.39530    0.32860
 H    2.43380    4.60890    2.09390
 C    0.21000    2.46190    3.25360
 H    0.53360    3.13800    4.06700
 H   -0.82710    2.14240    3.46300
 H    0.85410    1.56430    3.29470
 C   -1.02170   -0.55430    1.16290
 H   -0.84330   -0.34760    2.23400
 H   -2.08700   -0.34240    0.95440
 H   -0.84850   -1.63400    0.99250
 C    1.90690    0.11500    0.49540
 H    2.59940    0.69040   -0.14570
 H    2.13920    0.36050    1.54790
 H    2.11830   -0.96130    0.35270
 C   -0.24130    0.11380   -1.74890
 H   -0.07690   -0.95960   -1.95860
 H   -1.28950    0.34680   -2.01660
 H    0.41900    0.69650   -2.41760
