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Caption : fig.s1 simulation grid models. (a) piezoelectric vibrator. (b) three types of rectification structures: the series rectification structure, crescent bluff body, and nozzle-diffuser. (c) overall structure of the valveless. piezoelectric micropump.

File Name : figure s2.tif

Caption : fig. s2 the bottom pump body of pdms and the assembled piezoelectric valveless micropump.

File Name : figure s3.tif

Caption : fig. s3 flow resistance measuring experiment.

File Name : figure s4.tif

Caption : fig. s4 simulated internal flow fields of the micropump with different heights of the nested rectification structure: (a) 50 μm, (b) 100 μm, (c) 150 μm, (d) 200 μm, (e) 250 μm, and (f) 300 μm. the insets show enlarged views of the local flow field near the nested rectification region.

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Caption : fig. s5 experimental effect of frequency on the net flow rate of the micropump at a fixed driving voltage of 30 v.