Patterning by etching at the nanoscale

Definition: A process for shaping pliable polymer material using a microsized rigid frame or model called a 'mould'. A PDMS mould is etched with a fluoride-containing substance (breaking Si--O bonds at the surface). The fresh PDMS surface then reacts with a prepolymer.

ID: CMO:0001441

Synonyms:

More about the RSC Chemical Methods Ontology (CMO)