Electron-beam sputter deposition

Definition: A synthesis technique where a solid target is bombarded with electrons causing atoms to be ejected ('sputtering'). The ejected atoms then deposit, as a thin-film, on a substrate.

ID: CMO:0002283

Synonyms:

More about the RSC Chemical Methods Ontology (CMO)

Articles referencing this term

Interactions between metals and carbon nanotubes: at the interface between old and new materials
Florian Banhart, Nanoscale, 2009 , 1 , 201
DOI: 10.1039/b9nr00127a