Thermal chemical vapour deposition
Definition: A synthesis method where a substrate is placed in a heated atmosphere (600--800 deg. C) and exposed to one or more volatile precursors, which react or decompose on the surface to produce a deposit.
ID: CMO:0002330
Synonyms:
More about the RSC Chemical Methods Ontology (CMO)
Articles referencing this term
C. N. R. Rao, Rakesh Voggu and A. Govindaraj, Nanoscale, 2009
, 1
, 96
DOI: 10.1039/b9nr00104b