Thermal chemical vapour deposition

Definition: A synthesis method where a substrate is placed in a heated atmosphere (600--800 deg. C) and exposed to one or more volatile precursors, which react or decompose on the surface to produce a deposit.

ID: CMO:0002330


More about the RSC Chemical Methods Ontology (CMO)

Articles referencing this term

Selective generation of single-walled carbon nanotubes with metallic, semiconducting and other unique electronic properties
C. N. R. Rao, Rakesh Voggu and A. Govindaraj, Nanoscale, 2009 , 1 , 96
DOI: 10.1039/b9nr00104b