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Microfluidic & nanofluidic technologies for chemistry, physics, biology, and bioengineering
Paper
Lab Chip, 2010, 10, 101 - 110, DOI: 10.1039/b910248e
A low power, on demand electrothermal valve for wireless drug delivery applications
Po-Ying Li, Tina K. Givrad, Roya Sheybani, Daniel P. Holschneider, Jean-Michel I. Maarek and Ellis Meng
We present a low power, on demand Parylene MEMS electrothermal valve. A novel
-shaped thermal resistive element requires low power (
mW) and enables rapid valve opening (ms). Using both finite element analysis and valve opening experiments, a robust resistive element design for improved valve opening performance in water was obtained. In addition, a thermistor, as an inrush current limiter, was added into the valve circuit to provide variable current ramping. Wireless activation of the valve using RF inductive power transfer was demonstrated.
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