Issue 2, 2007
From the journal:

Lab on a Chip

A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics†

Tushar Bansal,‡*a   Meng-Ping Chang‡b  and  Michel M. Maharbizac  

* Corresponding authors

a Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, USA
E-mail: tbansal@umich.edu

b Department of Mechanical Engineering, University of Michigan, Ann Arbor, USA

c Department of Biomedical Engineering, University of Michigan, Ann Arbor, USA

Abstract

We report a class of ‘wet’ MEMS elastomer–metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.

Graphical abstract: A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics

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Article information

DOI
https://doi.org/10.1039/B614419E
Article type
Communication
Submitted
04 Oct 2006
Accepted
24 Nov 2006
First published
05 Dec 2006

Lab Chip, 2007,7, 164-166

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A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics

T. Bansal, M. Chang and M. M. Maharbiz, Lab Chip, 2007, 7, 164 DOI: 10.1039/B614419E

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