Improved quantitative analysis of hard coatings by radiofrequency glow discharge optical emission spectrometry (rf-GD-OES)

Richard Payling; Max Aeberhard; Daniel Delfosse

doi:10.1039/B007543O

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Richard Payling,*^a Max Aeberhard^b and Daniel Delfosse^c

Author affiliations

* Corresponding authors

^a Surface Analytical, 8 Donaldson Street, Port Kembla, Australia
E-mail: Designer@TheSpectroscopyNet.com

^b EMPA, Fuerwerkerstrasse 39, Thun, Switzerland

^c Mathys Medical Ltd., Orthopaedics, Güterstrasse 5, Bettlach, Switzerland

Abstract

Quantitative depth profiles are presented for a variety of hard coatings on tool steel. The coatings include TiN, TiC, TiCN and Cr₇C₃ coatings, produced in a commercial furnace by chemical vapour deposition (CVD), and TiAlN, CrN and MoS₂ + Ti coatings, prepared in a laboratory coater by physical vapour deposition (PVD). The profiles were obtained using rf-GD-OES and are the first to use a dc bias voltage correction and a hydrogen correction. These corrections involve a term called the 'inverse relative emission yield' and are simple functions of the dc bias voltage and hydrogen signal. These corrections mean bulk and coated samples with different electrical characteristics can be combined in a single calibration. The correct quantitative depth profile can now be obtained even in the presence of significant amounts of hydrogen in the coating.

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Article information

DOI: https://doi.org/10.1039/B007543O
Article type: Paper
Submitted: 18 Sep 2000
Accepted: 06 Nov 2000
First published: 18 Dec 2000

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J. Anal. At. Spectrom., 2001,16, 50-55

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